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  • ALD / CVD Precursor Series Products

    High-purity ALD/CVD precursor product is one of the core source materials in the whole electronic industry system. It has been widely used in many aspects of electronic devices manufacturing, such as computer chips, solar cells, mobile communications, satellite navigation, spacecraft and so on. It plays an important role in aerospace, new solar cells, electronic products and other fields.

    Hexachlorodisilane

    Cl6Si2

    ≥99.999995%

    Tetraethyl orthosilicate

    C8H20O4Si

    ≥99.9999999%

    Octamethyl cyclotetrasiloxane

    C8H24O4Si4

    ≥99.999999%

    Tetramethylsilane

    C4H12Si

    ≥99.99999%

    Trimethylborate

    C6H15BO3

    ≥99.9999999%

    Triethylphosphate

    C6H15O4P

    ≥99.9999999%

    Tetrakis(dimethylamido)titanium

    C8H24N4Ti

    ≥99.9999%

    Titaniumtetrachloride

    Cl4Ti

    ≥99.99999%

    彩合网